Chemnitz University of Technology – Center for Micro and Nano Technologies (ZfM)

The Center for Micro and Nano Technologies is a scientific research unit of the Faculty of Electrical Engineering and Information Technology at Chemnitz University of Technology. It is a reliable partner in basic research, R&D projects and direct research and development contracts for industry. The current focus of our research fields is on:

• 1D/2D Nanodevices
• MEMS Technologies and Devices
• Advanced Micro and Nano Patterning 
• Spintronics and Interconnect Systems
• Simulations in Nano Technology
• Molecular-based micro and nano systems
• Photonics/MOEMS
• Nano-Packaging
• Miniaturized plasma systems
• Digital Twins in Semiconductor Production

The Center for Micro and Nano Technologies has clean rooms with an area of about 1000 m² (300 m² of which are clean room class ISO 4) and the corresponding equipment for processing and characterization of wafers with diameters of 100 mm, 150mm and 200mm. A modern and extensive infrastructure with industry-related processes enables smallest structure dimensions down to 20 nm for nanostructuring. 

Services:

• Development of material, technology and functional demonstrators
• Manufacturing of prototypes and small series 
• Technology transfer to customers or foundries 
• Education of students and PhD students